论文部分内容阅读
石英晶体共振器的共振频率对温度是敏感的。过去,用单个微型石英共振器制作的温度计,由于利用这种灵敏度,已能准确探测μK级的温度变化。现在,利用半导体微制备技术,已经有可能用单片石英晶片制备出大量微共振器。业已证明,将这种微共振器的小热质量和高隔热能力、用一定数量的石英切片制作的共振器的陡频和温度特性以及石英晶体振荡器的低噪声特性相结合,可以生产出高性能的红外敏感器和敏感器列阵。在微共振器敏感器中,因红外能量的吸收而产生的温度变化会导致频率变化。这种频率变化可以相当于该共振器的小于1个μK的温度变化的分辨率测得。计算结果表明,200MHz-1GHz范围的微共振器列阵,可以为制作噪声等效温差NETD<0.01K的非致冷型红外成像系统提供基础。本文讨论了制作这种微共振器列阵所需克服的设计和制备问题。
The resonant frequency of quartz crystal resonators is temperature sensitive. In the past, a thermometer made of a single micro quartz resonator, due to the use of this sensitivity, has been able to accurately detect temperature changes in the μK level. Now, with the use of semiconductor micro-fabrication techniques, it has been possible to make a large number of micro-resonators from monolithic quartz wafers. It has been demonstrated that the combination of the small thermal mass of the microresonator with high thermal insulation capacity, the steepness and temperature characteristics of resonators made with a number of quartz chips, and the low noise nature of the quartz crystal oscillator can be produced High-performance infrared sensor and sensor array. In a micro-resonator sensor, a change in temperature due to the absorption of infrared energy causes a change in frequency. This frequency change can be measured at a resolution corresponding to a temperature change of less than one μK of the resonator. The results show that the micro-resonator array in the frequency range of 200MHz-1GHz can provide the foundation for the non-cooling infrared imaging system with noise equivalent temperature difference NETD <0.01K. This article discusses the design and fabrication issues that need to be overcome to fabricate such a microresonator array.