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研究了不锈钢上PVD Ag–Cu/Ti双层金属薄膜的力学性能,包括薄膜结合强度、弹性模量、复合硬度及残余应力。结果表明,该双层膜膜基结合良好;用4点弯曲法测得其弹性模量为63.4 GPa;薄膜复合硬度表现出异常的负荷依存性;用X射线法测得双层膜膜内应力为张应力,大小为160 MPa。
The mechanical properties of PVD Ag-Cu / Ti double-layer metal films on stainless steel were studied, including the bonding strength, elastic modulus, composite hardness and residual stress. The results show that the bilayer film has a good combination of film base and elastic modulus of 63.4 GPa by 4-point bending method. The film composite hardness shows abnormal load dependence. The internal stress of bilayer film is measured by X-ray method For tensile stress, the size is 160 MPa.