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目前我国已有十余家单位购置了背散射电子衍射 (EBSD)晶体取向与结构分析系统。该系统安装在扫描电镜上后 ,可实现晶体材料微区范围内取向与结构的快速分析 ,揭示材料内部丰富的组织、结构与取向信息。作者简单介绍了该技术的硬件配置、取向数据的采集过程、利用Hough变换自动识别衍射菊池带的原理、取向数据的处理 ,特别强调了其主要应用 ,即取向成像 (OrientationMapping) ,并举例说明了晶体材料微区取向分布的特征 ,希望对该技术在我国的推广起到促进作用。
At present, more than ten units in our country have purchased the system of backscattered electron diffraction (EBSD) crystal orientation and structure analysis. After the system is installed on a scanning electron microscope, the system can quickly analyze the orientation and structure within the microscopic region of the crystalline material and reveal the abundant internal structure, structure and orientation information of the material. The author briefly introduces the hardware configuration of the technology, the acquisition process of orientation data, the principle of using Hough transform to automatically identify the diffraction kikuchi zone, and the processing of orientation data, with particular emphasis on its main application, OrientationMapping, It is hoped that this technology can promote the popularization of this technology in our country.