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采用常压金属有机化学气相沉积技术在Al2O3(0001)衬底上生长出高质量的ZnO薄膜.用X射线双晶衍射ω和θ-2θ扫描、室温光致发光研究了不同生长温度对ZnO薄膜的结构、发光性能的影响.结果表明,随着生长温度的升高,ZnO薄膜的c轴晶格常数逐渐增大,a轴晶格常数逐渐变小,同时带隙相应逐渐增大.
High-quality ZnO films were grown on Al2O3 (0001) substrates by atmospheric pressure metal-organic chemical vapor deposition technique.The effects of different growth temperatures on the growth of ZnO thin films were investigated by X-ray double-crystal diffraction with ω and θ-2θ scanning at room temperature photoluminescence The results show that the lattice c-axis constant of ZnO films increases with the increase of the growth temperature and the lattice constant of a-axis becomes smaller and the band gap increases correspondingly.