多层薄膜广泛应用于集成电路芯片、各种微/纳传感器及微电子机械系统中。大量的研究表明,当这些材料的几何尺寸减小到亚微米甚至纳米尺度时,会表现出诸多不同于块体材料的物理性能。特别是其力学性能已不能够完全采用传统块体材料的理论与模型进行描述与评价。因此,澄清具有纳? Multilayer thin films are widely used in integrated circuit chips, various micro / nano sensors and microelectromechanical systems. Numerous studies show that when the geometries of these materials are reduced to submicron or even nanometer scale, they exhibit many different physical properties than bulk materials. In particular, its mechanical properties have not been able to fully describe and evaluate the theories and models of traditional bulk materials. Therefore, to clarify with satisfied?