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五十多年来,精密度盘的精度检定,普遍采用“常角法”,其中用得较广泛的是海弗林克法及耶利谢也夫法。这些方法,都要化费大量的观测和数据处理时间,并且不能检定小直径度盘及1度以内的小角度。本文叙述的方法,是一种多测位比较法,它利用环形莫尔条纹对偶然误差的良好平均作用,并采用多狭缝监视,得到了一种以低次谐波为主要成分的高精度的圆分度系统误差。从而可以只用几个测位的平均方法来消除此种系统误差对测量精度的影响。由于采用“比较法”来检定,使得检测与数据处理时间大为减少。根据上述原理,发展了一种“光栅式度盘检查仪”,其检定效率比“常角法”提高3~5倍,检定精度可达±0.2秒(最大误差),最小可检角度为5分,最小可检度盘直径为50毫米。仪器在配置光电自准直仪后,还可检定多面棱体的分度精度,其效率与全组合法相比,提高得更为显著。
Over the past 50 years, the accuracy of the precision plate test, the commonly used “law angle method”, which is more widely used is the Humphrek method and the Yelisekev method. These methods all cost a great deal of observation and data processing time, and can not test small-diameter discs and small angles within 1 degree. The method described in this paper is a multi-location comparison method that takes advantage of the well-balanced average effect of ring-shaped moire fringes on contingency errors and uses multi-slit monitoring to obtain a high-accuracy Circle indexing system error. Thus, the averaging method of only a few positions can be used to eliminate the influence of such system error on the measurement accuracy. As a result of the “comparison” to test, making detection and data processing time greatly reduced. According to the above principle, a “raster dial tester” has been developed. Its verification efficiency is 3 to 5 times higher than that of the “normal angle method”, and the verification accuracy is up to ± 0.2 seconds (maximum error). The minimum detectable angle is 5 Min, the smallest disc can check the diameter of 50 mm. After the instrument is equipped with photoelectric autocollimator, the instrument can also check the indexing accuracy of polyhedral prism, and the efficiency is more significant than that of the all-composite method.