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给出了国内几种不同规格傅里叶变换物镜波象差的剪切干涉检测结果,并将其中两种物镜在Zygo干涉仪上进行复测,两者结果完全一致。
The shear interference detection results of wave aberrations of several different specifications of Fourier transform objective lens in China were given, and the results of two tests were identical on the Zygo interferometer.