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本文研究了利用ＹＳＺ（Ｙ稳定的ＺｒＯ２）缓冲层在Ｓｉ衬底上单靶偏轴溅射Ｂｉ－Ｓｒ－Ｃａ－Ｃｕ－Ｏ高温超导薄膜的工艺条件，给出了ＹＳＺ和ＢＳＣＣＯ薄膜的性能测试结果，并根据电镜分析结果，提出了ＢＳＣＣＯ薄膜的螺旋柱状生长机理．
In this paper, the conditions of single-target Bi-Sr-Ca-Cu-O high temperature superconducting thin film sputtering on Si substrate by YSZ (Y-stabilized ZrO2) buffer layer are studied. The properties of YSZ and BSCCO films According to the result of electron microscopy, the mechanism of spiral columnar growth of BSCCO film was proposed.