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本文由简正形式的旁轴轨迹方程出发,探讨了典型静电成象系统的电子轨迹与电位分布所应满足的要求,导出了旁轴轨迹与轴上电位分布之间的关系式。文中提出了一种多项式作为数学模型,模拟电子轨迹,并可以通过电子计算机进行求解,最后给出了计算实例。按照本文提出的方法,系统逆设计能满足成象参量要求,且由于轴上电位分布考虑了静电成象系统的实际情况,故能较容易地获得所需要的电极结构。
In this paper, based on the simple formal paraxial trajectory equation, the requirements of the electronic trajectory and potential distribution of a typical electrostatic imaging system are discussed, and the relation between the paraxial trajectory and the on-axis potential distribution is derived. In this paper, a polynomial is proposed as a mathematical model to simulate the electronic trajectory, which can be solved by electronic computer. Finally, a calculation example is given. According to the proposed method, the inverse design of the system can meet the requirements of imaging parameters, and because the distribution of potential on the axis takes into account the actual situation of the electrostatic imaging system, it can more easily obtain the required electrode structure.