本文用俄歇电子能谱(AES)证明了铝原子在多晶硅晶粒间界分凝的现象,并研究了多晶硅的势垒电阻、少子寿命和霍耳迁移率.实验结果表明:铝原子的晶粒间界分提与铝原子的性质、铝原子扩散温度以及多晶硅的结构有关;铝原子晶粒间界分凝能在一定程度上改善多晶硅的电学特性,显示出铝原子晶粒间界分凝具有一定的应用潜力. In this paper, the phenomenon of aluminum atoms segregation in the boundaries of polycrystalline silicon has been proved by Auger electron spectroscopy (AES), and the barrier resistance, minority lifetime and Hall mobility of polycrystalline silicon have been studied.The experimental results show that the crystal of aluminum atoms Particle boundary separation is related to the properties of aluminum atoms, the diffusion temperature of aluminum atoms and the structure of polysilicon. The segregation of aluminum atoms between grains can improve the electrical properties of polysilicon to a certain extent, Has some potential applications.