Investigation of vacuum performances of TiZrV coated pipe

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：gzhp

【摘要】

：

<正>Some metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility.In this paper,a TiZr

【作者】

：

ZHANG Haiou DAI Dongdong TANG

【机构】

：

ShanghaiInstituteofAppliedPhysics

【出处】

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核技术：英文版

【发表日期】

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2011年6期

【关键词】

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高真空系统涂层管直流磁控溅射压力剖面表演真空性能金属化合物不锈钢管 TiZrV Activation Adsorption Pressure

【基金项目】

：

Acknowledgement This work is supported by frontier funds of Shanghai Institute of Applied Physics. The authors thank colleagues at Institute of Modern Physics for their help in fabricating the experim

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<正>Some metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility.In this paper,a TiZrV film on the surface of stainless steel vacuum pipe is made by direct current magnetron s

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Investigation of vacuum performances of TiZrV coated pipe

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