研究了X射线衍射(XRD)在薄膜结构分析中常见问题的解决方法,提出了取向生长薄膜的面内晶胞参数的测试及计算方法。实验表明,X射线束的扫描方向对反映的晶体结构信息产生影响。理论推导表明,在计算中选择合适强度和合适峰位的衍射峰,才能得到准确的晶胞参数。 The methods to solve the common problems of X-ray diffraction (XRD) in the thin film structure analysis were studied. The in-plane lattice parameters of the oriented growth films were calculated and calculated. Experiments show that the scanning direction of the X-ray beam has an influence on the crystal structure information reflected. The theoretical derivation shows that the accurate unit cell parameters can be obtained by choosing the diffraction peak of the appropriate intensity and the suitable peak position in the calculation.