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利用微电子机械加工技术成功地研制出电势激励、压阻拾振的高精度硅谐振梁式压力传感器 .传感器的谐振器的品质因素 Q值大于 170 0 0 .采用扫描检测方式和闭环自激振荡方式测定压力传感器的压力特性 ,其压力测试范围为 0～ 40 0 k Pa,线性相关系数为0 .99995 ,测试精度小于 0 .0 6 % F.S.
The use of microelectromechanical processing technology successfully developed a potential excitation, piezoresistive high-precision silicon resonant beam pressure sensor.Response of the resonator quality factor Q value greater than 170 0 0.Using scanning detection and closed-loop self-excited oscillation Way to measure the pressure characteristics of the pressure sensor, the pressure test range of 0 ~ 40 0 k Pa, the linear correlation coefficient of 0.99995, the test accuracy of less than 0.06% FS