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本文在小瓷管上用MOCVD技术沉积SnO_2气敏薄膜,研究了Pd、Th掺杂对该SnO_2元件气敏性能的影响。掺杂Pd使元件对乙醇、汽油的灵敏度均增大,而掺杂Th则仅提高了对乙醇的灵敏度,对汽油的灵敏度反有所降低。因此有希望开发为不受汽油干扰的乙醇敏感元件。
In this paper, a small porcelain tube deposited by MOCVD SnO_2 gas-sensitive film to study the Pd, Th doped gas sensing properties of the SnO_2 components. Doped Pd makes the components of ethanol, gasoline sensitivity are increased, while the doping Th only increased the sensitivity of ethanol, gasoline sensitivity decreased somewhat. There is therefore hope for the development of ethanol-sensitive components that are free from gasoline interference.