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数模转换器(DAC)的开关尖峰(毛刺)是影响电子束曝光机生产效率的最主要因素之一。对于集电极开关型DAC,采用自动温度补偿、限制元件功耗、外部线性微调等措施,研制成功快速14位DAC。它比现有国内各家电子束机通用的DAC(一般仅12～13位)毛刺都小,并小于美国进口16位转换器“DAC1136”。在低10位输出时,几乎没有毛刺,剃掉了严重影响图形精度的单元图形上的“胡子”,基本满足了电子束机制作大规棋集成电路1024动态随机存储器中间版大场一次扫描的要求。这种快速14位DAC在国内电子束机中还是第一次应用。
Switching dips (glitches) in digital-to-analog converters (DACs) are one of the most important factors that affect the production efficiency of electron beam lithography machines. For the collector switch DAC, using automatic temperature compensation, limiting component power consumption, external linear trim and other measures, the successful development of fast 14-bit DAC. It is smaller than conventional DACs (generally only 12 to 13 bits) in the domestic electron beam machines, and smaller than the 16-bit DAC1136 imported from the United States. In the low 10 output, almost no glitches, shaving off a serious impact on the graphics accuracy of the unit graphics “beard”, basically meet the electron beam machine Da Zhisu IC 1024 dynamic random access memory large version of a field scan Claim. This fast 14-bit DAC in the domestic electron beam machine is the first time.