论文部分内容阅读
研究了 PMOS剂量计在不同温度和栅偏置下的辐照退火表现 .结果表明 :温度和退火偏置条件是影响初始退火速率和退火幅度的重要因素 ,较高退火温度下 ,退火速率高 ,幅度大 ;相同退火温度下 ,正偏置与负偏置相比有加速退火的作用 ,其退火幅度也较大 .在 1 80℃ ,零偏条件下获得了最快的 1 0 0 %的退火效果 ;用模型讨论了实验结果
The results show that the temperature and annealing bias conditions are the important factors that affect the initial annealing rate and the annealing range. At higher annealing temperature, the annealing rate is higher, The magnitude of the annealing is much faster than that of the negative bias at the same annealing temperature, and the annealing range is also larger.While the fastest 100% annealing at 180 ℃ is obtained Effect; The model is used to discuss the experimental results