用散射指示线测量１～２５ｎｍ波段的粗糙度机械制造和微电子、科技和生活设备生产的新高精度工艺的发展对加工表面的质量提出了越来越高的要求。电子计算机存储用的光盘、视频和声频仪器记录磁头、高功率激光器和ｘ射线激光器的反射镜等都可看作典型例子。在这种情况下，... Measuring the Roughness of 1 ~ 25nm Band with Scattering Indicator Line The development of new high-precision technology in the field of mechanical manufacturing and microelectronics, technology and living equipment has put forward higher and higher requirements on the quality of the machined surface. Examples of electronic computer storage discs, video and audio instrument recording heads, high power lasers, and x-ray laser mirrors are examples. under these circumstances,...