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给出激光化学气相沉积法制备ａ－Ｓｉ３Ｎ４纳米粒子的原理和经验公式，在特定工艺参数下获得平均粒径为１０ｎｍ左右的优良ａ－Ｓｉ３Ｎ４纳米粒子。红外吸收和拉曼光谱研究表明，ａ－Ｓｉ３Ｎ４纳米粒子中存在Ｓｉ－Ｎ，Ｓｉ－Ｈ，Ｎ－Ｈ，Ｓｉ－Ｏ－Ｓｉ键，分析了ａ－Ｓｉ３Ｎ４纳米粒子在不同的温度和气氛退火后的变化情况。
The principle and empirical formula of a-Si3N4 nanoparticles prepared by laser chemical vapor deposition are given, and the excellent a-Si3N4 nanoparticles with average particle size of about 10 nm are obtained under the specific process parameters. The results of IR and Raman spectroscopy showed that Si-N, Si-H, N-H and Si-O-Si bonds were present in a-Si3N4 nanoparticles and the a-Si3N4 nanoparticles were annealed at different temperatures and atmospheres Changes in the situation.