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为了适应精密加工和超精密加工达到微米级甚至纳 米级加工要求,必须对它的支持环境严格控制。 这里的支持环境是指精密加工和超精密加工工艺系统 和工人操作经验及技术水平之外必须严格控制的各个 外部环境。它主要包括:空气环境,热环境,振动环 境,声环境,光环境和电场、电磁场环境等。对支持 环境方面所需要的控制品质要求参见表1-1构成支持 环境及控制要求。
In order to meet the precision machining and ultra-precision machining to micron or even nano-processing requirements, it must support the environment strictly controlled. Supporting environment here refers to the precision machining and ultra-precision machining technology systems and workers outside the operational experience and technical standards must be strictly controlled by the various external environment. It mainly includes: air environment, thermal environment, vibration environment, acoustic environment, light environment and electric field, electromagnetic environment and so on. The required control quality requirements for the support environment are shown in Table 1-1 to constitute the support environment and control requirements.