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针对传统的宽带膜厚监控法存在精度低和灵活性不高的缺陷,文章提出了一种新的方法,在蒸镀过程中不断拟合更新镀层的色散系数(折射率)、膜厚等参数,而后根据所得数据不断修正设想的目标透射率(反射率),以克服传统的宽带膜厚监控法的缺陷,这就是基于修正膜层目标光谱特性的宽带膜厚监控系统。
In order to overcome the shortcomings of low accuracy and low flexibility, a new method is proposed for the conventional broadband film thickness monitoring method. During the evaporation process, parameters such as the chromatic dispersion coefficient (refractive index) and film thickness , And then revised the assumed target transmittance (reflectivity) based on the obtained data to overcome the defect of the traditional broadband film thickness monitoring method, which is based on the broadband film thickness monitoring system which amends the target spectral characteristics of the film.