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微电子机械系统,光电仪器和整合半导体相关仪器生产蚀刻系统的厂商Surface Technology Systems(简称STS),今天揭示了新的蚀刻和沉积领域工具Pro Family,其可使微机电技术加速走向量产阶段。整个设计使得微机电的制造从技术导向进而转为生产效率的考量,而提高了生产效率,并以降低每一个晶圆的制程成本来走向量产化。新的Pro工作平台能和STS原有的Advanced Silicon Etch(ASE)技术兼容,该ASE技术能展现非等向性的(anisotropic)深硅蚀刻要求。
Surface Technology Systems (STS), a maker of etching systems for microelectromechanical systems, optoelectronic devices and integrated semiconductor-related instrumentation, today unveiled Pro Family, a tool in the field of etching and deposition that speeds MEMS to mass production. The entire design allows MEMS manufacturing from technology-oriented and then into production efficiency considerations, and improve production efficiency, and to reduce the cost of each wafer process to mass production. The new Pro platform is compatible with STS’s original Advanced Silicon Etch (ASE) technology that demonstrates anisotropic deep silicon etch.