论文部分内容阅读
微结构动态特性的测试方法对研发可靠的、能市场化的微机电系统(MEMS)是必需的。开发出了一种测试系统,能使微结构的三维运动可视化。系统包括:利用光学显微镜来实现微结构的放大,并将图像投影到CCD摄像机上;利用光切方法来获取一系列图像,以此来表征微结构的三维运动;利用频闪照明来冻结微结构的高速运动。通过研究微加工水平谐振器在激励条件下的三维运动,论证了系统的功能。
Testing of microstructural dynamics is essential for the development of reliable, market-enabled micro-electromechanical systems (MEMS). A test system has been developed that visualizes the three-dimensional movement of the microstructure. The system includes: magnifying the microstructure using an optical microscope and projecting the image onto a CCD camera; acquiring a series of images using a light-cut method to characterize the three-dimensional movement of the microstructure; freezing the microstructure with stroboscopic illumination High-speed movement. By studying the three-dimensional motion of the micro-machined horizontal resonator under excitation conditions, the function of the system is demonstrated.