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在干涉检验过程中,被检元件的面形误差检测精度受到干涉仪系统结构的影响,从而降低测量结果的可靠性。为了得到较高的检测精度,必须对检测系统进行分析,建立测量误差和系统结构的关联度。根据菲涅耳衍射近似理论,就菲佐干涉仪中的准直镜和标准镜面形误差对透过检测的影响进行了研究。通过对波前相位传递情况的分析,得出波前误差和系统结构参量的相关性,去除空腔系统误差,优化结构参量,并建立准直镜误差容限表达式。经计算得出,当被检面形变误差为0.2λ时,测试误差可以达到0.02λ,而对准直镜的面形误差要求只需0.8λ。
During the interference test, the detection accuracy of the surface error of the tested components is affected by the structure of the interferometer system, so as to reduce the reliability of the measurement results. In order to obtain higher detection accuracy, the detection system must be analyzed to establish the correlation between the measurement error and the system structure. Based on the Fresnel diffraction approximation theory, the effects of collimation and standard specular errors in the Fizo interferometer on transmission detection were investigated. By analyzing the wavefront phase transfer, the correlation between the wave front error and the system structure parameter is deduced, and the error of the cavity system is removed, the structural parameters are optimized, and the error tolerance expression of the collimator lens is established. It is calculated that when the deformation of the tested surface is 0.2λ, the test error can reach 0.02λ, while the surface shape error of the collimating lens only needs 0.8λ.