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二元光学被誉为“1 990年代的光学技术” ,在国防、科研、生产等领域都显示出广阔的应用前景。衍射光学元件有很多制作方法 ,比较成熟的有二元光学元件加工方法和激光或电子束直写技术加工方法。二元光学元件加工方法存在周期长、成本高且对准较困难的缺点。激光或电子束直写技术所需设备比较昂贵 ,只适合高精度单件生产。介绍了近来发展起来的另一种比较有前途的加工方法一灰度掩模法 ,并展望了其发展前景。
Binary optics, known as “optical technology in the1990s”, has shown broad application prospects in the areas of national defense, scientific research and production. There are many manufacturing methods of diffractive optical components, more sophisticated processing methods of binary optical components and laser or electron beam direct write processing methods. Binary optical components processing methods have the disadvantages of long cycle length, high cost and relatively difficult alignment. Laser or electron beam direct writing technology requires more expensive equipment and is only suitable for high-precision single-piece production. This paper introduces another promising gray-scale mask method that has been developed recently, and looks forward to its development prospect.