本文叙述了轮廓仪传感器的针尖半径的评定方法,给出了一种简单实用的针尖半径测量方法——“刀片法”,叙述了测量原理,并与用扫描电镜拍得的照片相比对,估算了测量误差并指出了测量中的几个注意事项。 This paper describes the evaluation method of the tip radius of the profiler sensor, gives a simple and practical method of measuring the tip radius - the “blade method”, describes the principle of measurement and compares it with the photograph taken by scanning electron microscope, The measurement error was estimated and a few notes in the measurement were pointed out.