论文部分内容阅读
通过TiB2和Al共溅射方法制备了约7.1%TiBx(原子分数)的铝基复合薄膜,采用三维原子探针并结合X射线衍射仪、透射电子显微镜和微力学探针表征了薄膜的微结构和力学性能.结果表明,在溅射粒子的高分散性和薄膜生长的非平衡性共同作用下,TiB2靶的溅射粒子以TiBx化合物的形式被超过饱和地固溶于Al的晶格中,Al固溶体晶粒细化为纳米晶并逐步非晶化,薄膜形成了较低溶质含量(约2%TiBx)纳米晶弥散分布于高溶质含量非晶基体中的两相结构并获得高硬度.结合实验结果讨论了超过饱和固溶体薄膜微结构形成的热力学和动力学原因.
Al-based composite films with TiBx of about 7.1% were prepared by co-sputtering of TiB2 and Al. The microstructure of the films was characterized by X-ray diffraction, transmission electron microscopy and micromechanical probe using three-dimensional atom probe And the mechanical properties of TiB2 sputtering target were investigated.The results show that the sputtered particles of TiB2 target are dissolved in the lattice of Al as saturated TiBx compound in the form of TiBx compound under the combined action of the high dispersion of sputtered particles and the unbalanced growth of the film, Al solid solution grain refinement into nanocrystalline and gradually amorphized, the film formed a low solute content (about 2% TiBx) nanocrystalline dispersed in high-solute amorphous matrix in the two-phase structure and obtain high hardness. The experimental results discuss the thermodynamic and kinetic reasons for the formation of microstructures beyond the saturated solid solution films.