介绍了一种简单而有效的对片上螺旋电感建立集总等效电路模型的方法,并提出了用电容和电感补偿等效代替的思想,实现了9个参数的宽频带电路。通过仿真ADS中空气桥横跨式结构和电介质隔离地下通道式结构,该等效模型在26～40GHz带宽内获得了S参数、有效电感值和Q值比较好的拟合效果,为片上螺旋电感的提参建模提供了快速、可行的方案。 A simple and effective method of establishing a lumped equivalent circuit model for on-chip spiral inductors is presented. A concept of equivalent replacement with compensation of capacitors and inductors is proposed, and a 9-parameter wideband circuit is implemented. By simulating the air bridge cross structure and dielectric isolation underground channel structure in ADS, the equivalent model obtains the good fitting effect of S-parameter, effective inductance and Q value in the bandwidth of 26-40 GHz, which is an on-chip spiral inductor The parametric modeling provides a quick and feasible solution.