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用IRaman谱研究了射频-直流等离子体化学气相沉积法制备的类金刚石膜结构，用弯曲法研究了类金刚石膜的应力，用光学显微镜对类金刚石膜中由于压应力的释放所形成的花样形貌进行了观察。类金刚石膜中存在1～4．7GPa的压应力。由于应力释放，在膜-基界面处观察到正弦曲线状、分枝状、直线状和花状花样外，还观察到时钟状和水泡状两种新型应力释放花样，用薄板起皱理论可以很好地解释这两种新花样。
The structure of diamond-like carbon (DLC) films prepared by RF-DC plasma chemical vapor deposition was studied by IRaman spectroscopy. The stress of DLC film was studied by bending method. The shape of diamond-like carbon film Appearance was observed. The diamond-like carbon film has a compressive stress of 1 to 4.7 GPa. Due to the release of stress, sinusoidal, branched, linear and flower-like patterns were observed at the membrane-base interface. Two novel stress relief patterns were also observed, such as bell-shaped and blister-shaped. Well explain these two new tricks.