论文部分内容阅读
本文建立了用于测量半导体载流子输运特性(载流子寿命、载流子扩散系数和前表面复合速度)的方波调制下自由载流子吸收(free carrier absorption,FCA)检测技术的时域理论模型.通过数值模拟,分析了在不同调制频率下时域曲线的变化趋势以及各个载流子输运参数对时域曲线的影响.结果表明方波调制下的自由载流子吸收的时域信号对各个参数都用较高的灵敏度,且参数值的测量范围大于频域测量范围.
In this paper, a free-carrier absorption (FCA) detection technique for the measurement of the carrier transport properties of semiconductors (carrier lifetime, carrier diffusion coefficient and front surface recombination velocity) Time-domain theoretical model, the trend of the time-domain curve and the influence of each carrier transport parameter on the time domain curve under different modulation frequencies are analyzed by numerical simulation.The results show that the free-carrier absorption under the square-wave modulation The time domain signal uses a higher sensitivity for each parameter, and the measurement range of the parameter value is greater than the frequency domain measurement range.