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为使陀螺仪进一步小型化、集成化,提出了一种新型单片集成三轴微机电陀螺仪,该陀螺仪采用单一MEMS结构芯片实现3个轴向角速度的测量。介绍了单片三轴陀螺仪工作方式、结构设计以及电路原理,完成了MEMS结构的流片加工,对陀螺仪表头和整机进行了测试,单片三轴微机电陀螺仪x轴、y轴和z轴零偏稳定性分别达到53.4(°)/h、70.8(°)/h和18.4(°)/h,非线性度分别为1.59×10~(-4)、3.3×10~(-4)和2.18×10~(-4)。该陀螺仪具有三轴角速率检测效应,具有集成度高、体积小的优势,具有较强的应用潜力。
In order to further miniaturize and integrate the gyroscope, a new type of monolithic integrated three-axis MEMS gyroscope is proposed. The gyroscope uses a single MEMS chip to realize the measurement of 3 axial angular velocities. The working principle, structure design and circuit principle of the monolithic three-axis gyroscope are introduced. The machining of the MEMS structure is completed. The gyroscope head and the whole machine are tested. The x-axis, y-axis And the z-axis zero bias stability were 53.4 (°) / h, 70.8 (°) / h and 18.4 (°) / h, respectively. The nonlinearity was 1.59 × 10 -4 and 3.3 × 10 ~ 4) and 2.18 × 10 ~ (-4). The gyroscope has three-axis angular velocity detection effect, with the advantages of high integration and small size, and has strong application potential.