Polyethylene terephthalate (PET) has been modified by Ag, Ti, Cu and Si ion implantation with a dose ranging from 1 × 1016 to 2 × 1017 ions/cm2 using a metal vapor vacuum arc (MEVVA) source. The electrical properties of PET have been improved by metal ion implantation. The resistivity of implanted PET decreased obviously with an increase in ion dose. The results show that the conductive behavior of a metal ion implanted sample is different from Si-implantation samples. In order to un-derstant the mechanism of electrical conduction, the structures of implanted layer were observed in detail by XRD and TEM. The nano carbon particles were dispersed in implanted PET. The nano metallic particles were built up in metallic ion implanted layers with dose range from 1 × 1016 to 1 × 1017 ions/ cm2. The nanometer metal net structure was formed in implanted layer when a dose of 2 × 1017ions/ cm2 is reached. Anomalous fractal growths were observed. These surface structure changes revealed conducting mechanism evo Polyethylene terephthalate (PET) has been modified by Ag, Ti, Cu and Si ion implantation with a dose ranging from 1 × 1016 to 2 × 1017 ions / cm2 using a metal vapor vacuum arc (MEVVA) source. The electrical properties of PET have The improved behavior by implanted ion is implanted in different ion implantation. The results show that the conductive behavior of a metal ion implanted sample is different from Si-implantation samples. In order to un-derstant the mechanism of electrical conduction, the structures of implanted layer were observed in detail by XRD and TEM. The nano carbon particles were dispersed in implanted PET. The nano metallic particles were built in metallic ion implanted layers with dose range from 1 × 1016 to 1 × 1019 ions / cm2. The nanometer metal net structure was formed in implanted layer when a dose of 2 × 1017ions / cm2 is reached. Anomalous fractal growths were observed. cting mechanism evo