一、前言 真空技术早在本世纪二十年代就被应用于金属热处理方面。只是到了五十年代由于核技术、空间技术、飞机制造业和电子技术的发展,新型材料如钛、铌钼合金、镍基、钴基高温合金的大量采用;对热处理过程中的氧化、脱碳、增碳、机械性能、表面状态及精度的保持等提出了越来 I. Introduction Vacuum technology was applied to metal heat treatment as early as the 1920s. It was only in the 1950s that the extensive use of new materials such as titanium, niobium and molybdenum alloys, nickel-based and cobalt-based superalloys due to the development of nuclear technology, space technology, aircraft manufacturing and electronic technology; the oxidation and decarburization , Increased carbon, mechanical properties, the maintenance of surface state and accuracy, etc. put forward more and more