报道了用电化学腐蚀法结合激光干涉或聚合物掩膜制备多孔硅通道波导、定向耦合器、波导棱镜、光栅耦合器和激光诱导动态光栅等光子器件,并给出了这些多孔硅光波导器件的性能参数,研究结果表明可利用多孔硅开发出新的全硅光电子器件. Reported the preparation of porous silicon channel waveguides, directional couplers, waveguide prisms, grating couplers and laser-induced dynamic gratings and other photonic devices by electrochemical etching combined with laser interference or polymer masks, and presented these porous silicon optical waveguide devices Of the performance parameters, the results show that porous silicon can be used to develop new all-silicon optoelectronic devices.