COPOLYMERS OF CHLOROETHYL METHACRYLATE, GLYCIDYL METHACRYLATE, AND METHYL METHACRYLATE AS SYNCHROTRO

来源 :高分子科学：英文版 | 被引量 : 0次 | 上传用户：liuyi8431201

【摘要】

：

The copolymers of chloroethyl methacrylate (CMA), glycidyl methacry-late (GMA), and methyl methacrylate (MMA) were synthesized in benzene solution. Theirbreadth

【作者】

：

方月娥陈大鹏刘刚王冰史天义胡一贯田扬超阚娅

【机构】

：

DepartmentofAppliedChemistry,UniversityofScienceandTechnologyofChina,Hefei230026,China,HefeiNational

【出处】

：

高分子科学：英文版

【发表日期】

：

1998年4期

【关键词】

：

Copolymer X-RAY PHOTORESISTS SUBMICRON Resolution copolymer X-ray photoresists

【基金项目】

：

This work is financially supported by the National Natural Science Foundation of China.

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The copolymers of chloroethyl methacrylate (CMA), glycidyl methacry-late (GMA), and methyl methacrylate (MMA) were synthesized in benzene solution. Theirbreadths of the molecular weight distributions are 2.1 and 2.3, respectively The ther-mal stability of

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COPOLYMERS OF CHLOROETHYL METHACRYLATE, GLYCIDYL METHACRYLATE, AND METHYL METHACRYLATE AS SYNCHROTRO

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