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采用中频反应磁控溅射方法和线性阳极层离子源实现了TiO2薄膜在线制备和在线离子束后处理。通过对薄膜光学性质的研究,发现氧离子束后处理对提高薄膜折射率,降低薄膜吸收率具有明显效果。为工业生产中,薄膜的在线制备及后处理提供了切实可行的手段。
The on-line preparation of TiO2 thin films and on-line ion beam post-treatment were achieved by IF magnetron sputtering and linear anode layer ion source. Through the study of the optical properties of the films, it was found that oxygen ion beam post-treatment has obvious effect on increasing the refractive index of the film and reducing the absorption rate of the film. For industrial production, online preparation and post-processing of films provides a practical means.