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自修整特性是亲水性固结磨料研磨垫(FAP)的重要性能之一.为了探究其自修整的实现机理,使用PHL-350型平面高速研磨抛光机对K9玻璃圆片进行马拉松式实验.研究了研磨压力和孔隙对研磨垫自修整性能的影响.实验表明:研磨压力从0.15 MPa提高到0.20 MPa,研磨垫的自修整效果显著提高,经过一段时间后,1#研磨垫和2#研磨垫的材料去除速率分别保持在10μm/min和8μm/min以上.同时,成孔剂的加入使基体砂浆磨损率提高了近7倍,提高了固结磨料研磨垫的材料去除速率的稳定性.因此,提高压力和适当弱化基体有助于实现固结磨料研磨垫的自修整过程.
Self-dressing is one of the most important properties of hydrophilic abrasive abrasive pad (FAP) .In order to explore its self-dressing mechanism, the K9 glass wafer was marathoned by PHL-350 planar high speed abrasive polisher. The effects of grinding pressure and porosity on the self-dressing performance of the polishing pad were investigated. The experimental results show that the self-dressing effect of the polishing pad is significantly improved when the grinding pressure is increased from 0.15 MPa to 0.20 MPa. After a period of time, The material removal rate of the pad was maintained at 10μm / min and 8μm / min, respectively, while the addition of pore-forming agent increased the wear rate of the matrix mortar by nearly 7 times, which improved the stability of the material removal rate of the abrasive pad. Therefore, increasing the pressure and properly weakening the substrate help to achieve the self-dressing process of the bonded abrasive pad.