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本文提出关于扩散硅压力传感器误差补偿的一种新方法,重点介绍该方法对零点温度漂移、灵敏度温度漂移以及非线性的补偿。
This paper presents a new method of error compensation for diffused silicon pressure sensors, focusing on the compensation of zero temperature drift, sensitivity temperature drift and nonlinearity.