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为促进表面等离子体谐振(surface plasmon resonance,SPR)测试技术在片上的实现,提出硅基近红外SPR芯片,由硅微棱镜、金属膜和聚合物微流体通道组成.利用有掩膜和无掩膜各向异性湿法腐蚀加工出底角为25.24°的单微硅棱镜阵列,用有掩膜各向异性湿法腐蚀加工出底角为54.74°的双微硅棱镜阵列,利用聚合物的复制注塑技术加工得到微流体通道.在波长1,550,nm时进行仿真与实验测试,实验测得以空气、水和乙醇为测试介质的SPR角分别为16.75°、22.58°和22.72°,这些值比以玻璃棱镜加工SPR传感器测得的SPR角要小很多.通过实验表明,近红外SPR芯片可以实现表面等离子体谐振传感器微型化,进而推动微全分析系统的实现,降低其成本并提高其性能.
In order to promote on-chip SPR testing, a silicon-based NIR SPR chip is proposed, which consists of a silicon microprism, a metal film and a polymer microfluidic channel. Anisotropic wet etching of the film was used to fabricate a single micro-silicon prism array with a bottom angle of 25.24 °. A double micro-silicon prism array with a bottom angle of 54.74 ° was fabricated by mask anisotropic wet etching. Injection molding technology to obtain microfluidic channels.When the wavelength is 1,550 nm, the simulation and experimental tests are carried out. The experimental results show that the SPR angles measured by air, water and ethanol are 16.75 °, 22.58 ° and 22.72 °, respectively. Prism processing SPR sensor measured the SPR angle is much smaller.Through experiments show that near infrared SPR chip surface plasmon resonance sensor can be miniaturized, and then promote the realization of micro-total analysis system, reduce the cost and improve its performance.