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自Liu和Cohn的理论研究预测可能存在一种硬度可与金刚石相比的氯化碳（－C。N4）材料以来，科技工作者采用各种技术、方法试图合成这种材料，并在不同工艺条件下对氯化碳材料生长及表征进行了大量的研究．但由于对氯化碳薄膜生长过程缺乏系统的了解，对这种材料生长规律的认识
Since Liu and Cohn’s theoretical study predicted that there might be a carbon-carbon (-C.N4) material that is comparable in hardness to diamonds, scientists and technologists have attempted to synthesize this material using various techniques and in different processes There have been a lot of studies on the growth and characterization of CCl 3. However, due to the lack of systematic understanding of the growth process of carbon chloride thin films, the understanding of the growth of this material