【摘 要】
:
A systematic study of the nonselective and smooth etching of GaN/AlGaN heterostructures was performed using Cl2/Ar/BCl3 inductively coupled plasmas (ICP).Nonsel
【机 构】
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State Key Lab of Integrated Optoelectronics
【基金项目】
:
国家自然科学基金;国家高技术研究发展计划(863计划);国家重点基础研究发展计划(973计划)
论文部分内容阅读
A systematic study of the nonselective and smooth etching of GaN/AlGaN heterostructures was performed using Cl2/Ar/BCl3 inductively coupled plasmas (ICP).Nonselective etching can be realized by adjusting the BCl3 ratio in the Cl2/Ar/BCl3 mixture (20%-60%), increasing the ICP power and dc bias, and decreasing the chamber pressure. Surface morphology of the etched heterostructures strongly depends on the gas chemistry and the chamber pressure. Specifically, with the addition of 20% BCl3 to Cl2/Ar (4:1) gas mixture, nonselective etching of GaN/Al0.28Ga0.72N heterostructures at high etch rate is maintained and the surface root-mean-square (rms) roughness is reduced from 10.622 to 0.495 nm, which is smoother than the as-grown sample. Auger electron spectroscopy (AES) analysis shows that the effective removal of residual oxygen from the surface of AlGaN during the etching process is crucial to the nonselective and smooth etching of GaN/AlGaN herterostructures at high etch rate.
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