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研究利用STM/AFM进行电场诱导氧化加工以及环境(特别是湿度)对纳米加工的影响。通过理论推导得出生成氧化物的线宽与探针偏压有着密切的联系,分析了偏压和场强对氧化速度的影响,比较了相对湿度分别为53%和92%时的加工结果,并在理论上论述了温度对加工的影响。
The effect of electric field induced oxidation using STM / AFM and the environment (especially humidity) on nanofabrication was investigated. The theoretic derivation shows that the line width of the generated oxide is closely related to the probe bias voltage. The influence of bias voltage and field strength on the oxidation rate is analyzed. The processing results when the relative humidity is 53% and 92% And theoretically discussed the impact of temperature on the processing.