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本文叙述了一种获得薄膜基片光学参数精确值的方法。在推导基片组反射和透过通量的计算结果时,考虑了二次反射。本文还图解了适用于测量的简单程序,求出了基片参量值,并用来校正在薄膜分光光度计测量中的基片影响。把校正过的薄膜测量值与所得到的光学常数计算的数据进行了比较。
This article describes a method to obtain the exact value of the optical parameters of a film substrate. In deriving the calculations of the substrate group reflection and the flux of permeation, secondary reflections are considered. This article also illustrates a simple procedure suitable for measurement, derives substrate parameter values, and is used to correct substrate effects in thin film spectrophotometer measurements. The corrected film measurements were compared to the data calculated for the obtained optical constants.