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采用三倍频射频辉光放电聚合技术,利用低压等离子聚合装置在不同功率条件下制备辉光放电聚合物(GDP)薄膜.利用表面轮廓仪、Fourier变换红外光谱仪表征所制备薄膜在不同功率下的生长速率和化学结构,讨论了功率变化对薄膜生长速度和化学结构的影响.利用元素分析仪和紫外可见光谱仪表征GDP薄膜中碳氢原子比和光学性质.研究表明:薄膜的生长速率随射频功率的增大先增加后减少,功率为40 W时,生长速率可达到0.34μm/h.在波长大于500 nm的可见光区,GDP薄膜的光学透过率都在90%以上.GDP薄膜的光学问隙随射频功率的增大先减少后增加,射频功率为50 W时制备GDP薄膜的光学间隙最小.
The glow discharge polymer (GDP) film was prepared by low frequency plasma polymerization under different power using triple frequency RF glow discharge polymerization technique.The surface profiler and Fourier transform infrared spectroscopy were used to characterize the prepared films at different power Growth rate and chemical structure were discussed.The effects of power variation on the growth rate and chemical structure of the film were also discussed.The elemental analyzer and UV-Vis spectrometer were used to characterize the hydrocarbon atomic ratio and optical properties of the GDP film.The results show that the growth rate of the film varies with the RF power Increases first and then decreases, and at a power of 40 W, the growth rate can reach 0.34 μm / h. In the visible region where the wavelength is greater than 500 nm, the optical transmittance of the GDP film is above 90% The gap decreases first and then increases with the increase of radio frequency power. When the radio frequency power is 50 W, the optical gap of GDP film is the smallest.