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利用2结构+1互联层多晶硅工艺,设计并制作出了直径为500mm的静电激励硅基二轴转镜微机械。在适度的激励电压下,镜面可做任意方向大角度连续性直流控制的倾斜运动。最低阶的谐振频率也比环境振动噪声高出许多,使得它们可以在几毫秒之内从环境振动噪声中分离出来。镀金反射镜利用扭转弹簧和轴承悬吊于万向节装置上,通过调节位于基片上的四个独立电极上的电压,可以控制反射镜的倾斜度。电极和弹簧的设计综合考虑了激励电压、谐振频率和偏转范围。为实现这一范围,在释放过程中轴被自适应机械系统升起并固定于距基片50mm的高度。自适应机械系统由单独的金属化薄层中精确控制的残余应力提供能量。在1mm间距的正方形阵列中包含16、64和256个独立地址微镜已经加工并封装成功。基于这些元件,成功制作了全功能型比特率及波长无关的单台阶低插入损耗单模光纤光学互连系统。
Using the structure of two +1 polysilicon layer interconnect technology, designed and manufactured a diameter of 500mm electrostatic excitation silicon two axis mirror micromachine. In the modest excitation voltage, the mirror can do any direction of large-angle continuous DC control tilting motion. The lowest order resonant frequencies are also much higher than ambient vibration noise, allowing them to be separated from ambient vibration noise in milliseconds. The gold-plated reflector is suspended from the gimbal assembly by means of torsion springs and bearings. The tilt of the mirror can be controlled by adjusting the voltage across the four independent electrodes on the substrate. The design of the electrodes and springs takes into account the excitation voltage, the resonant frequency and the deflection range. To achieve this range, the shaft is raised and fixed at a height of 50 mm from the substrate during release by the adaptive mechanical system. Adaptive mechanical systems provide energy from residual stresses that are precisely controlled in a single metallized layer. The inclusion of 16, 64 and 256 individual address micromirrors in a square array of 1 mm pitch has been processed and packaged successfully. Based on these components, a single-level single-mode low-loss single-mode fiber optic interconnection system with fully functional bit rate and wavelength independence has been successfully fabricated.