94mTc was produced via natMo(p, xn)94mTc reaction. Deposition of MoO3 on Cu substrate was carried out via two special sedimentation methods for the production of 94mTc. The 533 mg of MoO3, 600 μL of collodium (nitrocellulose) and 3 mL of acetone were used to prepare a MoO3 layer of 11.69 cm2 and 45.81 mg·cm-2. Also, a MoO3 layer was prepared by 533 mg of MoO3, 71.188 mg of methylcellulose and 4 mL of water. The targets were checked by SEM and thermal shock test. 94mTc was produced via natMo (p, xn) 94mTc reaction. Deposition of MoO3 on Cu substrate was carried out via two special sedimentation methods for the production of 94mTc. The 533 mg of MoO3, 600 μL of collodium (nitrocellulose) and 3 mL of acetone were used to prepare a MoO3 layer of 11.69 cm2 and 45.81 mg · cm-2. Also, a MoO3 layer was prepared by 533 mg of MoO3, 71.188 mg of methylcellulose and 4 mL of water. The targets were checked by SEM and thermal shock test.