近年来,光电子技术的迅速发展,对于激光测量技术的发展与应用起了决定性的作用。首先是从半导体激光器开始的激光光源的小型化,随后是导入了光纤和微小光学元件的光学系统的小型化,光和图象检测器的高灵敏度与高速化,数据和图象处理装置的 In recent years, the rapid development of optoelectronic technology has played a decisive role in the development and application of laser measurement technology. First, the miniaturization of the laser light source from the semiconductor laser, the miniaturization of the optical system into which the optical fiber and the minute optical element are introduced, the high sensitivity and high speed of the light and the image sensor, and the improvement of the speed of the data and image processing device