Analysis for Pull-In Voltage of a Multilayered Micro-Bridge Driven by Electrostatic Force

来源 :工程(英文)(1947-3931) | 被引量 : 0次 | 上传用户：lszh123321

【摘要】

：

A trial solution for bending deflection of a multilayered micro-bridge subject to a voltage induced load is presented. The relation between the applied voltage

【作者】

：

Y. LIU G.C. WANG H.Y. YANG

【机构】

：

不详

【出处】

：

工程(英文)(1947-3931)

【发表日期】

：

2010年1期

【关键词】

：

MEMS Electrostatic ACTUATION MULTILAYERED Micro-Bridge Trial Solution Energy Met

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A trial solution for bending deflection of a multilayered micro-bridge subject to a voltage induced load is presented. The relation between the applied voltage and the displacements of the micro-bridge in the pull-in state is analyzed by energy method. Fu

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Analysis for Pull-In Voltage of a Multilayered Micro-Bridge Driven by Electrostatic Force

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