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本文论述了利用阻尼最小二乘法对给定的电子光学静电透镜模型进行优化设计。目是在不引入校正设备的前提下,只通过改进设计方法,而使静电透镜的固有象差实现尽可能低的可行性,并提出了计算象差系数的新方法。
This paper discusses the optimal design of a given electro-optic electrostatic lens model using damped least squares. The purpose is to make the astigmatism of the electrostatic lens as low as possible by improving the design method without introducing a correction device and to propose a new method for calculating the aberration coefficient.