芬兰开发出利用脉冲激光沉积的世界第一个大规模生产设备。该系统可工业生产4英寸薄片的脉冲激光沉积涂层。涂层室采用专利工艺,可用微微秒高频激光沉积大面积薄膜涂层。冷烧法的好处是表面光滑无颗粒,靶材可完全涂覆于基材薄膜上。此系统可多层沉积,用材广泛,包括氧化物、金属与复 Finland has developed the world’s first large-scale production facility that uses pulsed laser deposition. The system manufactures pulsed laser deposition coatings on 4-inch wafers industrially. The coating chamber uses a patented process that allows the deposition of large area thin film coatings with picosecond high frequency lasers. The advantage of the cold method is that the surface is smooth and particle-free, and the target can be completely coated on the substrate film. The system can be multi-layer deposition, a wide range of materials, including oxides, metals and complex