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设计并制作出了一种基于MEMS静电微镜驱动器的光纤相位调制器。MEMS静电驱动器采用垂直梳齿驱动技术,驱动硅微反射镜沿其法线方向的垂直平移运动以实现入射光波的光相位调制。MEMS静电微镜驱动器与光纤准直器耦合构成MEMS光纤相位调制器,避免了拉伸光纤或改变折射率的困难,具有MEMS技术批量制造、低成本等优势。采用MEMS工艺成功制作出MEMS光纤相位调制器,并实现Michelson光纤干涉仪。利用ASE宽带光源对光纤相位调制器的静态调制特性进行测试,采用Michelson光纤干涉仪对光纤相位调制器的动态调制特性进行测试,结果表明,MEMS光纤相位调制器50V偏压实现了1 550nm光波的2π相位调制,当器件谐振频率为7.15kHz以及交、直流电压幅值分别为12.5V时,响应幅值可达6.8μm,可以实现多个2π的相位的正弦调制。
An optical fiber phase modulator based on MEMS electrostatic micromirror driver was designed and fabricated. MEMS electrostatic actuator vertical comb drive technology to drive the silicon micromirror along the normal direction of the vertical translational motion in order to achieve the optical phase modulation of incident light. The MEMS electrostatic micromirror driver and the fiber collimator are coupled to form a MEMS optical fiber phase modulator, which avoids the difficulty of stretching the optical fiber or changing the refractive index, and has the advantages of mass production of MEMS technology and low cost. The successful fabrication of MEMS optical fiber phase modulator with MEMS technology and the realization of Michelson optical fiber interferometer. The ASE broadband light source was used to test the static modulation characteristics of the fiber-optic phase modulator. The Michelson fiber-optic interferometer was used to test the dynamic modulation characteristics of the fiber-optic phase modulator. The results show that the MEMS fiber- 2π phase modulation. When the device resonant frequency is 7.15kHz and the AC / DC voltage amplitude is 12.5V, the response amplitude can reach 6.8μm, which can realize the sinusoidal modulation of several 2π phases.